X'inhi s-sistema tal-illustrar tal-jone ta 'preċiżjoni
Sistema tal-illustrar tal-jone ta 'preċiżjoni huwa strument użat fil-qasam tax-xjenza materjali. Għandu veloċità mgħaġġla tal-preparazzjoni tal-kampjun, li tippermetti kwalità għolja mikroskopija elettronika ta' trażmissjoni (TEM) kampjuni li tkun ippreparata bi spiża minima u sforz. L-istrument jista 'jitħaddem malajr u faċilment minħabba li huwa mgħammar b'pistola tal-jone b'enerġija baxxa, li hija partikolarment adattata għal traqqiq tal-kampjuni sensittivi għall-enerġija. Sistema tal-illustrar tal-jone ta 'preċiżjoni hija tipikament użata bi stadju kiesaħ tan-nitroġenu likwidu u hija partikolarment adattata għall-illustrar ta' kampjuni sensittivi għat-temperatura. L-użu ewlieni ta 'dan l-istrument huwa l-preparazzjoni ta' kampjuni TEM ta 'diversi materjali bħal ċeramika, semikondutturi, metalli, ligi, eċċ.
Karatteristiċi tas-sistema tal-illustrar tal-jone ta 'preċiżjoni
A. Sistema tal-illustrar tal-jone ta 'preċiżjoni għandu applikabilità wiesgħa ta 'materjali. Jone ta 'preċiżjoni illustrar Sistemi jista 'jintuża biex jipprepara kampjuni trasmissivi ta' film irqiq għal kważi l-materjali solidi kollha, bħal metalli, mhux metalli, semikondutturi, minerali, għadam, snien, eċċ.
B. The ion bombardment of the material does not have a significant tendency to select the various phase regions and generally results in a thin region of relatively uniform thickness. A wider choice of field of view is available for observation in the electron microscope, and the sample can be tilted at a large angle to obtain the desired results.
C. Samples prepared by ion bombardment are very clean and often have an oxide passivation film or other electrolytic products on the sample surface. However, this method affects the imaging quality when observed at high magnification, and it is easy to mix with fine precipitates inside the material.
D. The use of an sistema tal-illustrar tal-jone jippermetti illustrar unidirezzjonali minn naħa waħda tal-kampjun. Din it-teknika hija partikolarment adattata għall-istudju ta 'saffi ta' tkabbir permeabbli, depożizzjoni, u xogħol ieħor ta 'riċerka tal-wiċċ. Barra minn hekk, il- teknika tal-illustrar tal-jone ma jesponix lill-operatur għal aċidi, bażijiet u reaġenti oħra ta 'ħsara, li jfisser li s-sigurtà u s-saħħa tal-operatur mhumiex kompromessi.
Prinċipju ta 'ħidma tas-sistema tal-illustrar tal-jone ta' preċiżjoni
It-teknika ta ' illustrar tal-jone ta 'preċiżjoni jappartjeni għall-kategorija tal-ipproċessar tar-raġġ tal-joni. Il- sistema tal-illustrar tal-jone ta 'preċiżjoni jaħdem fuq il-prinċipji li ġejjin:
a. The ionization of argon gas is carried out at high pressure, and then the ionized argon ions bombard the sample surface under the action of the electric field.
b. Under the continuous bombardment of argon ions, the sample is slowly thinned until it meets the sample preparation requirements.
This working principle refers to the method of bombarding the sample surface with a high-energy ion beam, which causes elastic collisions with atoms on the sample surface; when the energy of the atoms on the sample surface increases above the escape work of the atoms, they fly away from the sample, thus causing the sample surface to continuously lose atoms – polishing. For example, use a precision ion polishing instrument to polish the dilute gas argon gas — in the vacuum environment of a high voltage electric field, when the argon ion passes through the central hole of the disk cathode, it will produce a high-energy particle beam to bombard the sample surface after accelerating and focusing; the high-energy ions will collide elastically with the sample surface; when the energy of the atoms on the surface of the sample increases above the work of escape of the atoms, they fly away from the sample; in this way, the atoms are continuously lost from the surface of the sample to achieve a polishing effect.
il sistema tal-illustrar tal-jone ta 'preċiżjoni huwa strument speċifiku ddisinjat għall-preparazzjoni ta 'kampjuni ta' trażmissjoni (kampjuni ta 'mikroskopija elettronika ta' trażmissjoni huma flieli irqaq ta 'diversi mikroni fil-ħxuna u 3mm fid-dijametru). Biex jintlaħqu l-kundizzjonijiet tax-xogħol tat-tagħmir, huwa meħtieġ li l-kampjun SEM jiġi ttrattat minn qabel. L-ewwel għandek taqta 'l-kampjun fi flieli ta' millimetru ħxuna u mbagħad tuża sandpaper biex tirramel il-kampjun. Meta xkatlar il-wiċċ tal-kampjun, għandek bżonn tagħżel is-sandpaper minn oħxon għal multa.
Kampjuni TEM huma ġeneralment żgħar ħafna fid-daqs u għandek twaħħal il-kampjun ma 'toqba żgħira fin-nofs tat-trasportatur. Id-daqs tal-kampjun għall-osservazzjoni SEM huwa ħafna akbar minn dak tal-kampjun tat-trasmissjoni. Biex iżżid l-effiċjenza, tista 'tpoġġi aktar minn kampjun wieħed kull darba u waħħalha fuq il-mejda tal-kampjun b'adeżiv li jdub bis-sħana. Imbagħad, għandek taġġusta l-parametri tax-xogħol tal-vultaġġ, fluss tal-jone argon, inklinazzjoni tal-kampjun, ħin tal-illustrar, eċċ Żieda fil-vultaġġ tax-xogħol u fluss tal-jone argon tista 'twassal għal żieda fl-effiċjenza tal-illustrar. Madankollu, jekk dawn iż-żewġ parametri huma ssettjati għoljin wisq, il-kampjun jista 'jagħmel ħsara faċilment.
Użu ta 'sistema tal-illustrar tal-jone ta' preċiżjoni
Passi tas-sistema tal-illustrar tal-jone ta 'preċiżjoni
A. Preparation for operation
a. Confirm the argon content in the argon cylinder; the output pressure should be 25PSI.
b. Turn off the left and right argon-ion guns; raise the carrier table, the instrument vacuum should reach 5E-4 Pa.
c. Verify that the left and right ion guns (ion beams) are centered.
B. Exchange trial film
a. The test piece is held in place with the test holder and moved toward the center of the area to be reduced.
b. Raise the carrier table and remove the top cover of the pre-pumping chamber.
c. Place the sample holder of the pre-sampling chamber into the test holder and cover the top cover of the pre-sampling chamber.
d. Lower the carrier table and wait for the indicator (please refer to the product manual for specific color changes).
C. Polishing
a. Set the polishing time.
b. Set operating voltage (usually set to 4Kev or 5 Kev).
c. Issettja pistola tal-jone mod ta 'tħaddim (ġeneralment issettjat għal modulazzjoni ta' raġġ ta 'jone doppju).
d. Adjust the left and right ion gun working angle (usually ±4 degrees).
e. Adjust argon working mode to Autogas mode.
f. Set carrier speed (usually 3RPM).
g. Start working mode.
h. Observe sample polishing during work.
i. After the sample is perforated, you can adjust to the low voltage and continue polishing until the thin area reaches the production requirement.
Prekawzjonijiet tas-sistema tal-illustrar tal-jone ta 'preċiżjoni
A. Daily use
M'hemmx bżonn li titfi l-istrument wara l-użu ta 'kuljum.
B. Power outage causes machine shutdown
a. Confirm whether the argon cylinder is closed tightly.
b. Turn off the main power.
C. Powering on after an error shutdown
a. Open the argon ċilindru tal-gass.
b. Turn on the main power.
c. Blow the ion gun to remove moisture from the surface of the ion gun to prevent the ion gun from becoming unstable due to air pollution. When the room pressure is lower than 5-3 EPA, open both air valve switches and purge for 15 minutes. The ion gun can be stopped when the beam current value is between 5 KeV and 8 μA.
d. It is necessary to wait until the vacuum level reaches 5-4ePa before normal operation.
e. When the ion gun is removed and reassembled, you should readjust the position to meet the operational requirements.
Speċifikazzjonijiet tekniċi tas-sistema tal-illustrar tal-jone ta 'preċiżjoni
a. Tilt range of sample stage: -120 to 210 degrees, the accuracy of 0.1 degrees.
b. SEM flat grinding table: max. φ25 mm × 12 mm.
c. TEM and FIB sample table: φ3mm.
d. Remote control can be achieved by setting the threshold value for termination of processing light transmission.
e. It should be ensured that the refrigeration system keeps the temperature of the sample preparation process within 25 degrees Celsius.
f. Independent double argon ion source, tilted ±45 degrees.
g. Capable of thinning single and double sides at small angles within a range of 10 degrees.
h. Capable of large-area ion polishing or thinning.
i. Particle energy: 800 volts – 10 kV adjustable, compensation 0.1 kV.
j. Ion beam current: up to 4.5 milliamps.
k. Time of sample changing within 3 minutes.
l. Equipped with optical microscope observation system.
m. Liquid nitrogen cooler and electronic temperature display.
n. Cooling time within 30 minutes and temperature can be set freely.
o. Sistema tal-illustrar tal-jone ta 'preċiżjoni mgħammar b'apparat kontra l-kontaminazzjoni biex jipproteġi l-indafa tal-kamra tal-kampjun.
p. Automated computer control with built-in reference parameters.
q. Oil-free vacuum systems with super silent molecular pump and oil-free mechanical pump two-stage system.
Applikazzjonijiet tas-sistema tal-illustrar tal-jone ta 'preċiżjoni
Kif issemma, is-sistema tal-illustrar tal-jone ta 'preċiżjoni tintuża ħafna fil-preparazzjoni tal-kampjun tal-mikroskopija elettronika tat-trażmissjoni (TEM), u ħafna drabi tintuża għall-illustrar finali ta' kampjuni li ġew imraqqxin mekkanikament. Jintuża wkoll ħafna biex jitnaddaf il-wiċċ tal-kampjun minn saffi bil-ħsara, saffi amorfi, kontaminanti, eċċ.
Il-prinċipju bażiku tat-traqqiq tal-jone huwa l-użu ta 'jonji Ar. Il-joni tal-Ar jintużaw biex jibbumbardjaw il-kampjun b'vultaġġi u kurrenti differenti biex jinkiseb l-effett tat-tirqiq tal-kampjun. Għall-istrumenti li jnaqqsu l-jone, il-vultaġġ operattiv huwa ġeneralment fil-medda ta 'diversi kV u l-kurrent operattiv huwa ġeneralment fil-medda ta' diversi mA, li jiddependi fuq ir-rekwiżiti.